This review presents the fundamentals of atomic force microscopy (AFM) with microcantilever probes and their use as fluidic sensors for the measurement of micro/nanoscale transport properties. Over the last two decades, AFM has been widely used for, among other purposes, nanoscale topography, nanomechanical characterization, and intermolecular force spectroscopy. Furthermore, a microcantilever, an essential part of AFM, has been modified and exploited as a mechanical transducer for various sensing applications. Among many prospective uses, there appears to be great potential for micro/nanoscale sensing of fluid density and viscosity (Sect. 3.1), temperature (Sect. 3.2), pressure (Sect. 3.3), and flow velocity (Sect. 3.4). These micro/nanomechanical measurement techniques are expected to complement the advanced optical and electrical measurement techniques currently employed for micro/nanoscale fluidic sensors and also to fill the gap between microscale and nanoscale fluidic transport property measurements.
Experiments in Fluids – Springer Journals
Published: Feb 3, 2010
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