Fabrication of Strain-Relaxed Si1 − x Gex/Si(001) Buffer Layers of Low Surface Roughness

Fabrication of Strain-Relaxed Si1 − x Gex/Si(001) Buffer Layers of Low Surface Roughness The results are presented of the fabrication of strain-relaxed graded Si1 − x Gex/Si(001) buffer layers with a maximum Ge fraction of about 0.25 that have a low density of threading dislocations (<106 cm−2) and low surface roughness. The buffer layers are grown by atmospheric-pressure hydride CVD. It is found that chemical mechanical polishing can reduce their surface roughness to a level comparable with that of the original Si(001) substrates. It is shown that the polished buffer layers can serve as substrates for MBE-grown SiGe/Si heterostructures. http://www.deepdyve.com/assets/images/DeepDyve-Logo-lg.png Russian Microelectronics Springer Journals

Fabrication of Strain-Relaxed Si1 − x Gex/Si(001) Buffer Layers of Low Surface Roughness

Loading next page...
 
/lp/springer_journal/fabrication-of-strain-relaxed-si1-x-gex-si-001-buffer-layers-of-low-pq7PVq7TPG
Publisher
Nauka/Interperiodica
Copyright
Copyright © 2005 by MAIK “Nauka/Interperiodica”
Subject
Engineering; Electrical Engineering
ISSN
1063-7397
eISSN
1608-3415
D.O.I.
10.1007/s11180-005-0029-0
Publisher site
See Article on Publisher Site

Abstract

The results are presented of the fabrication of strain-relaxed graded Si1 − x Gex/Si(001) buffer layers with a maximum Ge fraction of about 0.25 that have a low density of threading dislocations (<106 cm−2) and low surface roughness. The buffer layers are grown by atmospheric-pressure hydride CVD. It is found that chemical mechanical polishing can reduce their surface roughness to a level comparable with that of the original Si(001) substrates. It is shown that the polished buffer layers can serve as substrates for MBE-grown SiGe/Si heterostructures.

Journal

Russian MicroelectronicsSpringer Journals

Published: Jul 15, 2005

References

You’re reading a free preview. Subscribe to read the entire article.


DeepDyve is your
personal research library

It’s your single place to instantly
discover and read the research
that matters to you.

Enjoy affordable access to
over 12 million articles from more than
10,000 peer-reviewed journals.

All for just $49/month

Explore the DeepDyve Library

Unlimited reading

Read as many articles as you need. Full articles with original layout, charts and figures. Read online, from anywhere.

Stay up to date

Keep up with your field with Personalized Recommendations and Follow Journals to get automatic updates.

Organize your research

It’s easy to organize your research with our built-in tools.

Your journals are on DeepDyve

Read from thousands of the leading scholarly journals from SpringerNature, Elsevier, Wiley-Blackwell, Oxford University Press and more.

All the latest content is available, no embargo periods.

See the journals in your area

DeepDyve Freelancer

DeepDyve Pro

Price
FREE
$49/month

$360/year
Save searches from
Google Scholar,
PubMed
Create lists to
organize your research
Export lists, citations
Read DeepDyve articles
Abstract access only
Unlimited access to over
18 million full-text articles
Print
20 pages/month
PDF Discount
20% off