Fabrication of quasi-optical selective elements for the terahertz range in the form of pseudometallic structures via deep X-ray lithography

Fabrication of quasi-optical selective elements for the terahertz range in the form of... A technique for fabricating self-bearing pseudometallic structures, which hold promise for utilization as quasi-optical frequency-selective elements in the terahertz range of the electromagnetic spectrum, is discussed. The technique is based on microstructuring a continuous dielectric layer via stencilled X-ray lithography involving synchrotron radiation with subsequent metallization of the entire structure surface. The main manufacturing schemes are described, including fabrication of the initial substrates and X-ray masks. Examples of samples of the produced selective elements, such as frequency filters and flat lenses, as well as their operating characteristics, are presented. http://www.deepdyve.com/assets/images/DeepDyve-Logo-lg.png Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques Springer Journals

Fabrication of quasi-optical selective elements for the terahertz range in the form of pseudometallic structures via deep X-ray lithography

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Publisher
Pleiades Publishing
Copyright
Copyright © 2017 by Pleiades Publishing, Ltd.
Subject
Materials Science; Surfaces and Interfaces, Thin Films
ISSN
1027-4510
eISSN
1819-7094
D.O.I.
10.1134/S1027451017040073
Publisher site
See Article on Publisher Site

Abstract

A technique for fabricating self-bearing pseudometallic structures, which hold promise for utilization as quasi-optical frequency-selective elements in the terahertz range of the electromagnetic spectrum, is discussed. The technique is based on microstructuring a continuous dielectric layer via stencilled X-ray lithography involving synchrotron radiation with subsequent metallization of the entire structure surface. The main manufacturing schemes are described, including fabrication of the initial substrates and X-ray masks. Examples of samples of the produced selective elements, such as frequency filters and flat lenses, as well as their operating characteristics, are presented.

Journal

Journal of Surface Investigation. X-ray, Synchrotron and Neutron TechniquesSpringer Journals

Published: Aug 24, 2017

References

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