Fabrication of 0.5-μm structures by dry electron lithography and anisotropic plasma etching

Fabrication of 0.5-μm structures by dry electron lithography and anisotropic plasma etching A method for the fabrication of submicron (~0.5 μm) structures is presented. It includes the plasma formation of a three-layer mask, electron-beam exposure, plasma development, and anisotropic plasma etching of a resist and silicon oxide. The development in a fluorine-containing plasma forms the negative image of the exposed pattern (a set of parallel strips). The minimum resolution was 0.5 μm at the exposure dose 8 x l0-4C/cm2. The minimum exposure dose at which separate lines are developed was equal to 1 x 10-4 C/cm2 http://www.deepdyve.com/assets/images/DeepDyve-Logo-lg.png Russian Microelectronics Springer Journals

Fabrication of 0.5-μm structures by dry electron lithography and anisotropic plasma etching

Loading next page...
 
/lp/springer_journal/fabrication-of-0-5-m-structures-by-dry-electron-lithography-and-riiT9WwXwF
Publisher
Springer Journals
Copyright
Copyright © 2000 by MAIK “Nauka/Interperiodica”
Subject
Engineering; Electronic and Computer Engineering
ISSN
1063-7397
eISSN
1608-3415
D.O.I.
10.1007/BF02773282
Publisher site
See Article on Publisher Site

Abstract

A method for the fabrication of submicron (~0.5 μm) structures is presented. It includes the plasma formation of a three-layer mask, electron-beam exposure, plasma development, and anisotropic plasma etching of a resist and silicon oxide. The development in a fluorine-containing plasma forms the negative image of the exposed pattern (a set of parallel strips). The minimum resolution was 0.5 μm at the exposure dose 8 x l0-4C/cm2. The minimum exposure dose at which separate lines are developed was equal to 1 x 10-4 C/cm2

Journal

Russian MicroelectronicsSpringer Journals

Published: Dec 4, 2007

References

You’re reading a free preview. Subscribe to read the entire article.


DeepDyve is your
personal research library

It’s your single place to instantly
discover and read the research
that matters to you.

Enjoy affordable access to
over 18 million articles from more than
15,000 peer-reviewed journals.

All for just $49/month

Explore the DeepDyve Library

Search

Query the DeepDyve database, plus search all of PubMed and Google Scholar seamlessly

Organize

Save any article or search result from DeepDyve, PubMed, and Google Scholar... all in one place.

Access

Get unlimited, online access to over 18 million full-text articles from more than 15,000 scientific journals.

Your journals are on DeepDyve

Read from thousands of the leading scholarly journals from SpringerNature, Elsevier, Wiley-Blackwell, Oxford University Press and more.

All the latest content is available, no embargo periods.

See the journals in your area

DeepDyve

Freelancer

DeepDyve

Pro

Price

FREE

$49/month
$360/year

Save searches from
Google Scholar,
PubMed

Create lists to
organize your research

Export lists, citations

Read DeepDyve articles

Abstract access only

Unlimited access to over
18 million full-text articles

Print

20 pages / month

PDF Discount

20% off