An ESR investigation is conducted of P-doped, Zn-compensated Si single crystals. A narrow, faint peak is observed in the ESR spectra against the background of a broad, intense Lorentzian line produced by uniformly, randomly distributed Zn atoms. Examined at a finer magnetic-field resolution, the peak is found to contain a fine structure characteristic of a two-spin system in a triplet state. The two-spin system is identified as an isolated pair made up of a spin-0 neutral Zn atom and a spin-1/2 positively charged P ion. The atoms of the Zn-P pair are about 10 Å apart, as the value of the dipole constant implies (the distance is twice the Si lattice spacing). As the temperature is lowered, the Zn-P peak grows in intensity relative to the Lorentzian line, whose intensity and width decrease. The changes in the Zn-P peak with temperature when this is below 183 K indicate a considerable increase in Zn/P interatomic distance. This is attributable to a phase transition in the neighborhood of the ion pair.
Russian Microelectronics – Springer Journals
Published: Sep 27, 2005
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