Energy-efficient full-range oscillation analysis of parallel-plate electrostatically actuated MEMS resonators

Energy-efficient full-range oscillation analysis of parallel-plate electrostatically actuated... Electrostatic parallel-plate actuators are a common way of actuating microelectromechanical systems, both statically and dynamically. Nevertheless, actuation voltages and oscillations are limited by the nonlinearity of the actuator that leads to the pull-in phenomena. This work presents a new approach to obtain the electrostatic parallel-plate actuation voltage, which allows to freely select the desired frequency and amplitude of oscillation. Harmonic Balance analysis is used to determine the needed actuation voltage and to choose the most energy-efficient actuation frequency. Moreover, a new two-sided actuation approach is presented that allows to actuate the device in all the stable range using the Harmonic Balance Voltage. http://www.deepdyve.com/assets/images/DeepDyve-Logo-lg.png Nonlinear Dynamics Springer Journals

Energy-efficient full-range oscillation analysis of parallel-plate electrostatically actuated MEMS resonators

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Publisher
Springer Netherlands
Copyright
Copyright © 2017 by Springer Science+Business Media B.V.
Subject
Engineering; Vibration, Dynamical Systems, Control; Classical Mechanics; Mechanical Engineering; Automotive Engineering
ISSN
0924-090X
eISSN
1573-269X
D.O.I.
10.1007/s11071-017-3633-8
Publisher site
See Article on Publisher Site

Abstract

Electrostatic parallel-plate actuators are a common way of actuating microelectromechanical systems, both statically and dynamically. Nevertheless, actuation voltages and oscillations are limited by the nonlinearity of the actuator that leads to the pull-in phenomena. This work presents a new approach to obtain the electrostatic parallel-plate actuation voltage, which allows to freely select the desired frequency and amplitude of oscillation. Harmonic Balance analysis is used to determine the needed actuation voltage and to choose the most energy-efficient actuation frequency. Moreover, a new two-sided actuation approach is presented that allows to actuate the device in all the stable range using the Harmonic Balance Voltage.

Journal

Nonlinear DynamicsSpringer Journals

Published: Jul 5, 2017

References

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