Emission tomography of plasma in technological reactors of microelectronics

Emission tomography of plasma in technological reactors of microelectronics Optical emission tomography is a promising method for the analysis of the lateral distribution of the particle density in plasma of plasma-chemical reactors, which is very critical in technological processes of microelectronics on large-diameter wafers. In this work, we propose an algorithm of the tomographic reconstruction of the 2D distribution of plasma components in the cross section of the reactor by their spectrally allowed optical emission at an extremely small number of recording angles. The geometry of the collection of the tomographic data was selected so that it would be compatible with the existing industrial types of plasma reactors. The algorithm is tested for artificially created phantoms in a physical model experiment and is applied to an actual plasma chemical reactor. http://www.deepdyve.com/assets/images/DeepDyve-Logo-lg.png Russian Microelectronics Springer Journals

Emission tomography of plasma in technological reactors of microelectronics

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Publisher
SP MAIK Nauka/Interperiodica
Copyright
Copyright © 2009 by Pleiades Publishing, Ltd.
Subject
Engineering; Electrical Engineering
ISSN
1063-7397
eISSN
1608-3415
D.O.I.
10.1134/S1063739709020036
Publisher site
See Article on Publisher Site

Abstract

Optical emission tomography is a promising method for the analysis of the lateral distribution of the particle density in plasma of plasma-chemical reactors, which is very critical in technological processes of microelectronics on large-diameter wafers. In this work, we propose an algorithm of the tomographic reconstruction of the 2D distribution of plasma components in the cross section of the reactor by their spectrally allowed optical emission at an extremely small number of recording angles. The geometry of the collection of the tomographic data was selected so that it would be compatible with the existing industrial types of plasma reactors. The algorithm is tested for artificially created phantoms in a physical model experiment and is applied to an actual plasma chemical reactor.

Journal

Russian MicroelectronicsSpringer Journals

Published: Mar 28, 2009

References

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