Electrophysical parameters in HCl-Ar, HCl-H2, and HCl-Cl2 mixtures are studied under conditions of the direct-current (DC) glow discharge. It is shown that there is no increasing in the concentration of atomic chlorine in HCl-Ar and, in HCl-H2 and there are no significant changes in the kinetics of atomicmolecular processes and, therefore, in the balance of neutral particles in the plasma. The increase in the concentration of admixture gas in HCl-Cl2 is accompanied by the monotonic increase in the concentration of chlorine atoms and the density of their flux to the surface that bounds the plasma volume.
Russian Microelectronics – Springer Journals
Published: Sep 12, 2014
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