The numerical-and-analytical model of charging the conical dielectric ring with a beam of inert gases, which is parallel to its axis and has a constant bulk density, is developed. It is shown that such a ring can be used as a lens in the charged steady state. It is shown that with an input diameter of 0.8 mm, an angle between the cone generatrix and the axis of 10−2 rad, and a length of 1 mm, this lens has a focal distance of 3.4 mm, a spherical aberration coefficient of 760 m, and a coefficient of chromatic aberration of 14 mm. Such a lens can be used as an objective in an ion microscope, which is comparable with the best modern ion microscopes by resolution. However, such a device will be considerably cheaper.
Russian Microelectronics – Springer Journals
Published: Sep 4, 2012
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