Model Si–SiO2–Ti–Pt–PZT multilayer structures obtained by chemical solution deposition at excessive (relative to the stoichiometric composition) amounts of lead in the starting film-forming solution (x= 0–30 mol %) were studied by TEM and X-ray microanalysis techniques. In the absence of excessive lead, the films crystallize largely into the metastable phase of pyrochlore, which does not have ferroelectric properties. With an excessive amount of lead added, PZT ceramic crystallizes into the ferroelectric phase of perovskite and has columnar grains ∼0.2 μm in size. The thermal stability of the metallization system during the formation of the ferroelectric film was investigated. A 180-nm-thick transition layer between the Pt electrode and the adhesive titanium film was discovered. This layer, resulting from high-temperature synthesis, consists of fine-grain platinum, as well as metal oxides and silicides.
Russian Microelectronics – Springer Journals
Published: Aug 1, 2014
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