Electron Microscopy Study of Ferroelectric Memory Based on Si–SiO2–Ti–Pt–PZT Multilayer Structure

Electron Microscopy Study of Ferroelectric Memory Based on Si–SiO2–Ti–Pt–PZT Multilayer... Model Si–SiO2–Ti–Pt–PZT multilayer structures obtained by chemical solution deposition at excessive (relative to the stoichiometric composition) amounts of lead in the starting film-forming solution (x= 0–30 mol %) were studied by TEM and X-ray microanalysis techniques. In the absence of excessive lead, the films crystallize largely into the metastable phase of pyrochlore, which does not have ferroelectric properties. With an excessive amount of lead added, PZT ceramic crystallizes into the ferroelectric phase of perovskite and has columnar grains ∼0.2 μm in size. The thermal stability of the metallization system during the formation of the ferroelectric film was investigated. A 180-nm-thick transition layer between the Pt electrode and the adhesive titanium film was discovered. This layer, resulting from high-temperature synthesis, consists of fine-grain platinum, as well as metal oxides and silicides. http://www.deepdyve.com/assets/images/DeepDyve-Logo-lg.png Russian Microelectronics Springer Journals

Electron Microscopy Study of Ferroelectric Memory Based on Si–SiO2–Ti–Pt–PZT Multilayer Structure

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Publisher
Springer-Verlag
Copyright
Copyright © 2001 by MAIK “Nauka/Interperiodica”
Subject
Engineering; Electrical Engineering
ISSN
1063-7397
eISSN
1608-3415
D.O.I.
10.1023/A:1011314710094
Publisher site
See Article on Publisher Site

Abstract

Model Si–SiO2–Ti–Pt–PZT multilayer structures obtained by chemical solution deposition at excessive (relative to the stoichiometric composition) amounts of lead in the starting film-forming solution (x= 0–30 mol %) were studied by TEM and X-ray microanalysis techniques. In the absence of excessive lead, the films crystallize largely into the metastable phase of pyrochlore, which does not have ferroelectric properties. With an excessive amount of lead added, PZT ceramic crystallizes into the ferroelectric phase of perovskite and has columnar grains ∼0.2 μm in size. The thermal stability of the metallization system during the formation of the ferroelectric film was investigated. A 180-nm-thick transition layer between the Pt electrode and the adhesive titanium film was discovered. This layer, resulting from high-temperature synthesis, consists of fine-grain platinum, as well as metal oxides and silicides.

Journal

Russian MicroelectronicsSpringer Journals

Published: Aug 1, 2014

References

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