Electron Cyclotron Resonance Used in Low-Pressure Microwave Plasma Reactors with Permanent Magnets

Electron Cyclotron Resonance Used in Low-Pressure Microwave Plasma Reactors with Permanent Magnets Methods are discussed for sustaining low-pressure microwave plasmas in which ionization is by high-energy electrons confined to permanent-magnet traps. Regions of electron cyclotron resonance are considered, which play a key role in wave-electron coupling. The results are presented of a computer simulation of electron heating in a permanent-magnet trap. Against this background, basic requirements are set out concerning the design of such plasma reactors. http://www.deepdyve.com/assets/images/DeepDyve-Logo-lg.png Russian Microelectronics Springer Journals

Electron Cyclotron Resonance Used in Low-Pressure Microwave Plasma Reactors with Permanent Magnets

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Publisher
Nauka/Interperiodica
Copyright
Copyright © 2005 by MAIK “Nauka/Interperiodica”
Subject
Engineering; Electrical Engineering
ISSN
1063-7397
eISSN
1608-3415
D.O.I.
10.1007/s11180-005-0030-7
Publisher site
See Article on Publisher Site

Abstract

Methods are discussed for sustaining low-pressure microwave plasmas in which ionization is by high-energy electrons confined to permanent-magnet traps. Regions of electron cyclotron resonance are considered, which play a key role in wave-electron coupling. The results are presented of a computer simulation of electron heating in a permanent-magnet trap. Against this background, basic requirements are set out concerning the design of such plasma reactors.

Journal

Russian MicroelectronicsSpringer Journals

Published: Jul 15, 2005

References

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