An experimental investigation is presented into the magnitude and sign of nonflatness for Ag/Cu electrodes obtained by splitting a Si/Ti/Ag/Cu stack produced by Cu electrodeposition. The characteristic is considered in relation to electrolyte temperature. The contact area between a Si/Ti and a Ag/Cu electrode is estimated. The conformality of the two electrode surfaces is essential for creating tunnel-effect thermoelectric coolers and power generators with a vacuum nanogap, promising power supplies that make use of electron tunneling.
Russian Microelectronics – Springer Journals
Published: Sep 21, 2008
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