Electrical parameters and the plasma composition in HCl-H2 mixtures

Electrical parameters and the plasma composition in HCl-H2 mixtures The influence of the initial composition of an HCl-H2 mixture on the steady-state parameters and composition of a dc glow discharge plasma (p = 40–200 Pa, i p = 15–35 mA) is investigated. The calculated data on the electron energy distributions, integral characteristics of the electron gas, and plasma composition are gathered. It is shown that the dilution of HCl with hydrogen is not accompanied by a noticeable variation either in the efficiency of processes under the electron impact or in the intensity of the ion bombardment of the surface in contact with the plasma. http://www.deepdyve.com/assets/images/DeepDyve-Logo-lg.png Russian Microelectronics Springer Journals

Electrical parameters and the plasma composition in HCl-H2 mixtures

Efremov, A.; Yudina, A.; Svettsov, V.
Russian Microelectronics, Volume 40 (6) – Nov 9, 2011
8 pages
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Publisher
Springer Journals
Copyright
Copyright © 2011 by Pleiades Publishing, Ltd.
Subject
Engineering; Electrical Engineering
ISSN
1063-7397
eISSN
1608-3415
D.O.I.
10.1134/S1063739711060059
Publisher site
See Article on Publisher Site

Abstract

The influence of the initial composition of an HCl-H2 mixture on the steady-state parameters and composition of a dc glow discharge plasma (p = 40–200 Pa, i p = 15–35 mA) is investigated. The calculated data on the electron energy distributions, integral characteristics of the electron gas, and plasma composition are gathered. It is shown that the dilution of HCl with hydrogen is not accompanied by a noticeable variation either in the efficiency of processes under the electron impact or in the intensity of the ion bombardment of the surface in contact with the plasma.

Journal

Russian Microelectronics – Springer Journals

Published: Nov 9, 2011

References

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  • Fizicheskie velichiny

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