The influence of the initial composition of an HCl-H2 mixture on the steady-state parameters and composition of a dc glow discharge plasma (p = 40–200 Pa, i p = 15–35 mA) is investigated. The calculated data on the electron energy distributions, integral characteristics of the electron gas, and plasma composition are gathered. It is shown that the dilution of HCl with hydrogen is not accompanied by a noticeable variation either in the efficiency of processes under the electron impact or in the intensity of the ion bombardment of the surface in contact with the plasma.
Russian Microelectronics – Springer Journals
Published: Nov 9, 2011
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