The steady-state parameters and the composition of the dc glow discharge plasma (p = 40–200 Pa, i = 30–70 mA) in methane are investigated by the probe diagnostics and mathematical modeling when solving the Boltzmann kinetic equation. The data on the reduced electric field strength, the electron energy distributions, the rate constants of the processes during the electron impact, the concentrations of charged particles, and the densities of their fluxes on the surface, which restrict the plasma region, are obtained. It is established that the associative electron detachment from the negative ion H− + R → H-R + e (where R = H, CH3, CH2, CH ...) substantially affects the balance of the charged particles in the plasma.
Russian Microelectronics – Springer Journals
Published: Sep 3, 2013
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