Electrical parameters and concentrations of charged particles in methane plasma

Electrical parameters and concentrations of charged particles in methane plasma The steady-state parameters and the composition of the dc glow discharge plasma (p = 40–200 Pa, i = 30–70 mA) in methane are investigated by the probe diagnostics and mathematical modeling when solving the Boltzmann kinetic equation. The data on the reduced electric field strength, the electron energy distributions, the rate constants of the processes during the electron impact, the concentrations of charged particles, and the densities of their fluxes on the surface, which restrict the plasma region, are obtained. It is established that the associative electron detachment from the negative ion H− + R → H-R + e (where R = H, CH3, CH2, CH ...) substantially affects the balance of the charged particles in the plasma. http://www.deepdyve.com/assets/images/DeepDyve-Logo-lg.png Russian Microelectronics Springer Journals

Electrical parameters and concentrations of charged particles in methane plasma

Loading next page...
Springer US
Copyright © 2013 by Pleiades Publishing, Ltd.
Engineering; Electrical Engineering
Publisher site
See Article on Publisher Site


You’re reading a free preview. Subscribe to read the entire article.

DeepDyve is your
personal research library

It’s your single place to instantly
discover and read the research
that matters to you.

Enjoy affordable access to
over 12 million articles from more than
10,000 peer-reviewed journals.

All for just $49/month

Explore the DeepDyve Library

Unlimited reading

Read as many articles as you need. Full articles with original layout, charts and figures. Read online, from anywhere.

Stay up to date

Keep up with your field with Personalized Recommendations and Follow Journals to get automatic updates.

Organize your research

It’s easy to organize your research with our built-in tools.

Your journals are on DeepDyve

Read from thousands of the leading scholarly journals from SpringerNature, Elsevier, Wiley-Blackwell, Oxford University Press and more.

All the latest content is available, no embargo periods.

See the journals in your area

Monthly Plan

  • Read unlimited articles
  • Personalized recommendations
  • No expiration
  • Print 20 pages per month
  • 20% off on PDF purchases
  • Organize your research
  • Get updates on your journals and topic searches


Start Free Trial

14-day Free Trial

Best Deal — 39% off

Annual Plan

  • All the features of the Professional Plan, but for 39% off!
  • Billed annually
  • No expiration
  • For the normal price of 10 articles elsewhere, you get one full year of unlimited access to articles.



billed annually
Start Free Trial

14-day Free Trial