Electrical Behavior of In Situ Doped Polysilicon Films as Influenced by the Dopants

Electrical Behavior of In Situ Doped Polysilicon Films as Influenced by the Dopants The dependence of the resistivity of doped polysilicon films on fabrication conditions is studied experimentally. The films are produced from a silane-germane-diborane or a silane-germane-phosphine gas mixture, being doped with germanium in combination with boron or phosphorus, respectively. The process parameters are identified that strongly influence the resistivity and temperature coefficient of resistance of the resulting films. They are (i) the volume ratio of germane to silane, (ii) the volume ratio of silane and germane to diborane and phosphine, (iii) substrate temperature, and (iv) annealing temperature. Common and distinctive features are identified in the patterns of behavior of resistivity observed in undoped and variously doped films. It is shown that film resistivity is to a large extent determined by grain size. It is also found that increasing the temperature of deposition or annealing makes for lower film resistivity. http://www.deepdyve.com/assets/images/DeepDyve-Logo-lg.png Russian Microelectronics Springer Journals

Electrical Behavior of In Situ Doped Polysilicon Films as Influenced by the Dopants

Loading next page...
Copyright © 2005 by MAIK “Nauka/Interperiodica”
Engineering; Electrical Engineering
Publisher site
See Article on Publisher Site


You’re reading a free preview. Subscribe to read the entire article.

DeepDyve is your
personal research library

It’s your single place to instantly
discover and read the research
that matters to you.

Enjoy affordable access to
over 12 million articles from more than
10,000 peer-reviewed journals.

All for just $49/month

Explore the DeepDyve Library

Unlimited reading

Read as many articles as you need. Full articles with original layout, charts and figures. Read online, from anywhere.

Stay up to date

Keep up with your field with Personalized Recommendations and Follow Journals to get automatic updates.

Organize your research

It’s easy to organize your research with our built-in tools.

Your journals are on DeepDyve

Read from thousands of the leading scholarly journals from SpringerNature, Elsevier, Wiley-Blackwell, Oxford University Press and more.

All the latest content is available, no embargo periods.

See the journals in your area

Monthly Plan

  • Read unlimited articles
  • Personalized recommendations
  • No expiration
  • Print 20 pages per month
  • 20% off on PDF purchases
  • Organize your research
  • Get updates on your journals and topic searches


Start Free Trial

14-day Free Trial

Best Deal — 39% off

Annual Plan

  • All the features of the Professional Plan, but for 39% off!
  • Billed annually
  • No expiration
  • For the normal price of 10 articles elsewhere, you get one full year of unlimited access to articles.



billed annually
Start Free Trial

14-day Free Trial