Effect of the thickness of Si film on Si/Se film doped silicon prepared by femtosecond laser

Effect of the thickness of Si film on Si/Se film doped silicon prepared by femtosecond laser The high infrared absorption of silicon could be achieved by doping silicon with chalcogens via femtosecond laser. In the paper, the samples of Se-doped silicon with different thickness of Si film were prepared with the aid of femtosecond laser. The effect of the thickness of silicon film on optical and the electrical properties of se-doped silicon is investigated. All the samples were thermally annealed at 500 °C for 1 h, and the absorptance of all the samples was found with a certain degree of reduction. With the increase of thickness of silicon film, the results of visible-near infrared spectrum showed that the infrared absorptance increased first and then decreased. In particular, the optical absorption, sheet carrier density and responsivity for samples prepared with the silicon film that was 300 nm thick were greater than that of the samples prepared with the Si films of other thickness. The experiment demonstrated that it is significant to select the silicon film of appropriate thickness in the fabrication of Se doped silicon. http://www.deepdyve.com/assets/images/DeepDyve-Logo-lg.png Journal of Materials Science: Materials in Electronics Springer Journals

Effect of the thickness of Si film on Si/Se film doped silicon prepared by femtosecond laser

Loading next page...
 
/lp/springer_journal/effect-of-the-thickness-of-si-film-on-si-se-film-doped-silicon-Y5RXNUjfoh
Publisher
Springer US
Copyright
Copyright © 2017 by Springer Science+Business Media, LLC, part of Springer Nature
Subject
Materials Science; Optical and Electronic Materials; Characterization and Evaluation of Materials
ISSN
0957-4522
eISSN
1573-482X
D.O.I.
10.1007/s10854-017-8401-5
Publisher site
See Article on Publisher Site

Abstract

The high infrared absorption of silicon could be achieved by doping silicon with chalcogens via femtosecond laser. In the paper, the samples of Se-doped silicon with different thickness of Si film were prepared with the aid of femtosecond laser. The effect of the thickness of silicon film on optical and the electrical properties of se-doped silicon is investigated. All the samples were thermally annealed at 500 °C for 1 h, and the absorptance of all the samples was found with a certain degree of reduction. With the increase of thickness of silicon film, the results of visible-near infrared spectrum showed that the infrared absorptance increased first and then decreased. In particular, the optical absorption, sheet carrier density and responsivity for samples prepared with the silicon film that was 300 nm thick were greater than that of the samples prepared with the Si films of other thickness. The experiment demonstrated that it is significant to select the silicon film of appropriate thickness in the fabrication of Se doped silicon.

Journal

Journal of Materials Science: Materials in ElectronicsSpringer Journals

Published: Dec 11, 2017

References

You’re reading a free preview. Subscribe to read the entire article.


DeepDyve is your
personal research library

It’s your single place to instantly
discover and read the research
that matters to you.

Enjoy affordable access to
over 18 million articles from more than
15,000 peer-reviewed journals.

All for just $49/month

Explore the DeepDyve Library

Search

Query the DeepDyve database, plus search all of PubMed and Google Scholar seamlessly

Organize

Save any article or search result from DeepDyve, PubMed, and Google Scholar... all in one place.

Access

Get unlimited, online access to over 18 million full-text articles from more than 15,000 scientific journals.

Your journals are on DeepDyve

Read from thousands of the leading scholarly journals from SpringerNature, Elsevier, Wiley-Blackwell, Oxford University Press and more.

All the latest content is available, no embargo periods.

See the journals in your area

DeepDyve

Freelancer

DeepDyve

Pro

Price

FREE

$49/month
$360/year

Save searches from
Google Scholar,
PubMed

Create lists to
organize your research

Export lists, citations

Read DeepDyve articles

Abstract access only

Unlimited access to over
18 million full-text articles

Print

20 pages / month

PDF Discount

20% off