Effect of the sputtering parameters on the physical properties and photocatalytic reactivity of TiO2 thin films prepared by an RF magnetron sputtering deposition method

Effect of the sputtering parameters on the physical properties and photocatalytic reactivity of... Visible light-responsive TiO2 (Vis-TiO2) thin films were successfully developed by applying a radio-frequency magnetron sputtering deposition method by controlling various sputtering parameters such as the substrate temperature, Ar gas pressure, and the target-to-substrate distance. UV–Vis, XRD and SEM investigations revealed that optical property, the crystal structure, and photocatalytic activity of Vis-TiO2 are strongly affected by the sputtering parameters during the deposition step. Vis-TiO2 was found to act as an efficient photocatalyst for the H2 and O2 evolution from water under visible light irradiation (λ ≥ 420 nm). SIMS investigations have revealed that a slight decrease in the O/Ti ratio of the TiO2 thin films plays an important role in the modification of the electronic properties of Vis-TiO2 thin films, enabling them to absorb visible light. http://www.deepdyve.com/assets/images/DeepDyve-Logo-lg.png Research on Chemical Intermediates Springer Journals

Effect of the sputtering parameters on the physical properties and photocatalytic reactivity of TiO2 thin films prepared by an RF magnetron sputtering deposition method

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Publisher
Springer Netherlands
Copyright
Copyright © 2012 by Springer Science+Business Media B.V.
Subject
Chemistry; Catalysis; Physical Chemistry; Inorganic Chemistry
ISSN
0922-6168
eISSN
1568-5675
D.O.I.
10.1007/s11164-012-0624-8
Publisher site
See Article on Publisher Site

Abstract

Visible light-responsive TiO2 (Vis-TiO2) thin films were successfully developed by applying a radio-frequency magnetron sputtering deposition method by controlling various sputtering parameters such as the substrate temperature, Ar gas pressure, and the target-to-substrate distance. UV–Vis, XRD and SEM investigations revealed that optical property, the crystal structure, and photocatalytic activity of Vis-TiO2 are strongly affected by the sputtering parameters during the deposition step. Vis-TiO2 was found to act as an efficient photocatalyst for the H2 and O2 evolution from water under visible light irradiation (λ ≥ 420 nm). SIMS investigations have revealed that a slight decrease in the O/Ti ratio of the TiO2 thin films plays an important role in the modification of the electronic properties of Vis-TiO2 thin films, enabling them to absorb visible light.

Journal

Research on Chemical IntermediatesSpringer Journals

Published: Jun 15, 2012

References

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