Effect of doping on the temperature coefficient of resistance of polysilicon films

Effect of doping on the temperature coefficient of resistance of polysilicon films For doped polysilicon films, an experimental investigation is presented into the variation of temperature coefficient of resistance (TCR) with formation conditions, the dopants being rare-earth elements (Eu, Gd, and Yb), oxygen, germanium, and implanted boron or phosphorus. The sign and magnitude of the TCR are shown to be governed by the dopant concentrations and the conditions of postimplantation annealing. Common and specific features are identified in the behavior of TCR for undoped films and for doped ones differing in dopant and doping technique. A negative TCR is observed in undoped films and in ones doped with a rare-earth element or germanium. B or P ion implantation into films predoped with Ge is shown to give a positive TCR if the implant concentration exceeds 1018 atoms/cm3. With any of the dopants employed, raising the dopant concentration makes possible the transition from a negative to a positive TCR. http://www.deepdyve.com/assets/images/DeepDyve-Logo-lg.png Russian Microelectronics Springer Journals

Effect of doping on the temperature coefficient of resistance of polysilicon films

Loading next page...
 
/lp/springer_journal/effect-of-doping-on-the-temperature-coefficient-of-resistance-of-7i9lSTzplR
Publisher
Nauka/Interperiodica
Copyright
Copyright © 2007 by Pleiades Publishing, Ltd.
Subject
Engineering; Electrical Engineering
ISSN
1063-7397
eISSN
1608-3415
D.O.I.
10.1134/S1063739707030031
Publisher site
See Article on Publisher Site

References

You’re reading a free preview. Subscribe to read the entire article.


DeepDyve is your
personal research library

It’s your single place to instantly
discover and read the research
that matters to you.

Enjoy affordable access to
over 12 million articles from more than
10,000 peer-reviewed journals.

All for just $49/month

Explore the DeepDyve Library

Unlimited reading

Read as many articles as you need. Full articles with original layout, charts and figures. Read online, from anywhere.

Stay up to date

Keep up with your field with Personalized Recommendations and Follow Journals to get automatic updates.

Organize your research

It’s easy to organize your research with our built-in tools.

Your journals are on DeepDyve

Read from thousands of the leading scholarly journals from SpringerNature, Elsevier, Wiley-Blackwell, Oxford University Press and more.

All the latest content is available, no embargo periods.

See the journals in your area

Monthly Plan

  • Read unlimited articles
  • Personalized recommendations
  • No expiration
  • Print 20 pages per month
  • 20% off on PDF purchases
  • Organize your research
  • Get updates on your journals and topic searches

$49/month

Start Free Trial

14-day Free Trial

Best Deal — 39% off

Annual Plan

  • All the features of the Professional Plan, but for 39% off!
  • Billed annually
  • No expiration
  • For the normal price of 10 articles elsewhere, you get one full year of unlimited access to articles.

$588

$360/year

billed annually
Start Free Trial

14-day Free Trial