Effect of additions of Ar and He on the parameters and composition of the HBr plasma

Effect of additions of Ar and He on the parameters and composition of the HBr plasma The model investigation of the effect of the initial composition of the HBr/Ar and HBr/He mixtures on the steady-state parameters and composition of the glow discharge dc plasma (p = 30−250 Pa, i d = 20 mA) is performed. The calculated data on the energy distributions of electrons, integral characteristics of the electron gas, and concentrations of neutral and charged particles are obtained. It is shown that the main effects of the influence of the initial composition of the mixture on the concentration of active particles are associated with variations in electrical parameters of the plasma. http://www.deepdyve.com/assets/images/DeepDyve-Logo-lg.png Russian Microelectronics Springer Journals

Effect of additions of Ar and He on the parameters and composition of the HBr plasma

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Publisher
SP MAIK Nauka/Interperiodica
Copyright
Copyright © 2010 by Pleiades Publishing, Ltd.
Subject
Engineering; Electrical Engineering
ISSN
1063-7397
eISSN
1608-3415
D.O.I.
10.1134/S1063739710050082
Publisher site
See Article on Publisher Site

Abstract

The model investigation of the effect of the initial composition of the HBr/Ar and HBr/He mixtures on the steady-state parameters and composition of the glow discharge dc plasma (p = 30−250 Pa, i d = 20 mA) is performed. The calculated data on the energy distributions of electrons, integral characteristics of the electron gas, and concentrations of neutral and charged particles are obtained. It is shown that the main effects of the influence of the initial composition of the mixture on the concentration of active particles are associated with variations in electrical parameters of the plasma.

Journal

Russian MicroelectronicsSpringer Journals

Published: Sep 24, 2010

References

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