Dopant diffusion dynamics and optimal diffusion time as influenced by diffusion-coefficient nonuniformity

Dopant diffusion dynamics and optimal diffusion time as influenced by diffusion-coefficient... The dynamics of dopant diffusion in forming a pn junction is investigated theoretically for an epilayer-substrate system. The influence is examined of diffusion-coefficient nonuniformity on the doping dynamics. On this basis, requirements for the depth profile of the diffusion coefficient are defined in respect of the junction abruptness and depth. Further, the optimal diffusion time is determined in terms of striking a balance between the doping uniformity in the epilayer and the abruptness of the junction. http://www.deepdyve.com/assets/images/DeepDyve-Logo-lg.png Russian Microelectronics Springer Journals

Dopant diffusion dynamics and optimal diffusion time as influenced by diffusion-coefficient nonuniformity

Loading next page...
 
/lp/springer_journal/dopant-diffusion-dynamics-and-optimal-diffusion-time-as-influenced-by-LuftD6KGiX
Publisher
Springer Journals
Copyright
Copyright © 2007 by Pleiades Publishing, Ltd.
Subject
Engineering; Electrical Engineering
ISSN
1063-7397
eISSN
1608-3415
D.O.I.
10.1134/S1063739707010040
Publisher site
See Article on Publisher Site

Abstract

The dynamics of dopant diffusion in forming a pn junction is investigated theoretically for an epilayer-substrate system. The influence is examined of diffusion-coefficient nonuniformity on the doping dynamics. On this basis, requirements for the depth profile of the diffusion coefficient are defined in respect of the junction abruptness and depth. Further, the optimal diffusion time is determined in terms of striking a balance between the doping uniformity in the epilayer and the abruptness of the junction.

Journal

Russian MicroelectronicsSpringer Journals

Published: Feb 1, 2007

References

You’re reading a free preview. Subscribe to read the entire article.


DeepDyve is your
personal research library

It’s your single place to instantly
discover and read the research
that matters to you.

Enjoy affordable access to
over 18 million articles from more than
15,000 peer-reviewed journals.

All for just $49/month

Explore the DeepDyve Library

Search

Query the DeepDyve database, plus search all of PubMed and Google Scholar seamlessly

Organize

Save any article or search result from DeepDyve, PubMed, and Google Scholar... all in one place.

Access

Get unlimited, online access to over 18 million full-text articles from more than 15,000 scientific journals.

Your journals are on DeepDyve

Read from thousands of the leading scholarly journals from SpringerNature, Elsevier, Wiley-Blackwell, Oxford University Press and more.

All the latest content is available, no embargo periods.

See the journals in your area

DeepDyve

Freelancer

DeepDyve

Pro

Price

FREE

$49/month
$360/year

Save searches from
Google Scholar,
PubMed

Create lists to
organize your research

Export lists, citations

Read DeepDyve articles

Abstract access only

Unlimited access to over
18 million full-text articles

Print

20 pages / month

PDF Discount

20% off