A method is presented for the fast nondestructive inspection of oxide-thickness distribution over a small site of interest on a metal or semiconductor specimen. The method rests on specular reflectometry and is incorporated in a computer-based video microscope. From digital images of small sites, statistical characteristics of the thickness distribution are derived and local topographical images of the film surface are generated using three-dimensional computer graphics. A relationship is established between these data and the protective property of the oxide against corrosion. The practical value of the approach is confirmed by experiment. The experimental data indicate that the instrument and technique employed can accurately quantify the uniformity of thickness distribution.
Russian Microelectronics – Springer Journals
Published: Oct 13, 2004
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