Porous silicon materials, macro- and mesoporous silicon, obtained by electrochemical anodic etching of n- and p-Si were studied by differential thermal analysis at a steady temperature rise and under isothermal conditions in nitrogen atmosphere and in air. The method was used to estimate the presence and amount of phases of surface volatile compounds. The possibility was studied to perform a comparative estimate of the specific surface area of different types of porous silicon from data on the surface oxidation kinetics determined by the dynamic differential thermal analysis in air.
Russian Journal of Applied Chemistry – Springer Journals
Published: Dec 23, 2009
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