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B.S. Danilin, V.Yu. Kireev (1987)
Primenenie nizkotemperaturnoi plazmy dlya travleniya i ochistki materialov
P. Macko, P. Veis, G. Cernogora (2004)
Study of oxygen atom recombination on a Pyrex surface at different wall temperatures by means of time-resolved actinometry in a double pulse discharge techniquePlasma Sources Science and Technology, 13
Yu. Kirillov, D. Sitanov (2005)
Evaluating the Wall-Recombination Constant of Cl Atoms in Cl2-Ar Plasmas of Different Ar PercentageRussian Microelectronics, 34
Atomic recombination in chlorine plasma on the surface of the plasma chemical reactor made from molybdenum glass and in the presence of stainless-steel samples is investigated using the relaxation pulsed procedure jointly with absorption spectroscopy. Rate constants and probabilities of heterogeneous annihilation of chlorine atoms on glass and stainless steel are determined experimentally.
Russian Microelectronics – Springer Journals
Published: Sep 30, 2011
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