Design of SAW sensor for longitudinal strain measurement with improved sensitivity

Design of SAW sensor for longitudinal strain measurement with improved sensitivity This paper presents the design of a highly sensitive surface acoustic wave (SAW)-based sensor with novel structure for the longitudinal strain measurement. The sensor utilizes thin lithium niobate (LiNbO ) diaphragm as the sensing element rather than the bulk substrate. The application of the diaphragm effectively decreases the cross-sectional area of the strain sensitive element, and meanwhile reduces the resistance between the sensor and the specimen. The newly designed strain sensor is to operate around a frequency of 50 MHz. The insertion loss of - 12 dB and quality factor of 63 are obtained analytically from impulse-response model. The sensor performance with tensile testing of the steel beam is predicted by the finite element method. The prestressed eigenfrequency analysis is conducted with the COMSOL commercial software. The simulation shows the resonance frequency of the sensor shifts linearly with the strain induced in the testing beam. For the SAW sensor with traditional configuration applying 1 mm thick substrate, the strain sensitivity is obtained as 0.41 ppm/le. For the sensor with the novel design employing thin diaphragm with the thickness of 200 lm, the strain sensitivity is increased to 0.83 ppm/le. With the availability of the bulk micromachining of LiNbO , http://www.deepdyve.com/assets/images/DeepDyve-Logo-lg.png Microsystem Technologies Springer Journals

Design of SAW sensor for longitudinal strain measurement with improved sensitivity

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Publisher
Springer Journals
Copyright
Copyright © 2018 by Springer-Verlag GmbH Germany, part of Springer Nature
Subject
Engineering; Electronics and Microelectronics, Instrumentation; Nanotechnology; Mechanical Engineering
ISSN
0946-7076
eISSN
1432-1858
D.O.I.
10.1007/s00542-018-3970-7
Publisher site
See Article on Publisher Site

Abstract

This paper presents the design of a highly sensitive surface acoustic wave (SAW)-based sensor with novel structure for the longitudinal strain measurement. The sensor utilizes thin lithium niobate (LiNbO ) diaphragm as the sensing element rather than the bulk substrate. The application of the diaphragm effectively decreases the cross-sectional area of the strain sensitive element, and meanwhile reduces the resistance between the sensor and the specimen. The newly designed strain sensor is to operate around a frequency of 50 MHz. The insertion loss of - 12 dB and quality factor of 63 are obtained analytically from impulse-response model. The sensor performance with tensile testing of the steel beam is predicted by the finite element method. The prestressed eigenfrequency analysis is conducted with the COMSOL commercial software. The simulation shows the resonance frequency of the sensor shifts linearly with the strain induced in the testing beam. For the SAW sensor with traditional configuration applying 1 mm thick substrate, the strain sensitivity is obtained as 0.41 ppm/le. For the sensor with the novel design employing thin diaphragm with the thickness of 200 lm, the strain sensitivity is increased to 0.83 ppm/le. With the availability of the bulk micromachining of LiNbO ,

Journal

Microsystem TechnologiesSpringer Journals

Published: May 28, 2018

References

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