Solutions obtained in the course of designing integral multielement thermal detectors, in which an array of detector elements of a thin ferroelectric film is formed, are presented. Based on the tools of the CAD system, the parameters of the signal readout circuit of the pyroelectric detectors are optimized and a set of documents for manufacturing an integrated circuit (IC) of the detector with design rules of 0.18 μm is formed. A distinctive feature of the proposed development is the possibility of the parametric trimming of the conversion coefficients due to the repolarization of each element of the ferroelectric array in the process of calibration.
Russian Microelectronics – Springer Journals
Published: Feb 16, 2017
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