Microelectromechanical systems (MEMS) have already found widespread use in highly integrated audio applications. Currently, they are used for microphones where their small size has enabled the use of multiple microphones in a single device to improve noise cancellation. Nowaday, even loudspeakers realized as MEMS structures are possible, which brings up new challenges in circuit design that are the focus of this paper.
e & i Elektrotechnik und Informationstechnik – Springer Journals
Published: Jan 23, 2018
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