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Deposition of polysiloxane films in a glow discharge

Deposition of polysiloxane films in a glow discharge The method of polymerization in the plasma of a dc glow discharge was used to obtain thin-film polysiloxane coatings on metallic substrates. The chemical composition, structure, and deposition rate of the coatings were studied in relation to process parameters. http://www.deepdyve.com/assets/images/DeepDyve-Logo-lg.png Russian Journal of Applied Chemistry Springer Journals

Deposition of polysiloxane films in a glow discharge

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References (9)

Publisher
Springer Journals
Copyright
Copyright © 2006 by Pleiades Publishing, Inc.
Subject
Chemistry; Chemistry/Food Science, general; Industrial Chemistry/Chemical Engineering
ISSN
1070-4272
eISSN
1608-3296
DOI
10.1134/S1070427206010319
Publisher site
See Article on Publisher Site

Abstract

The method of polymerization in the plasma of a dc glow discharge was used to obtain thin-film polysiloxane coatings on metallic substrates. The chemical composition, structure, and deposition rate of the coatings were studied in relation to process parameters.

Journal

Russian Journal of Applied ChemistrySpringer Journals

Published: Mar 23, 2006

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