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B.S. Danilin (1972)
Vakuumnaya tekhnika v proizvodstve integral’nykh skhem
M.G. Berdichevskii, V.V. Marusin (1993)
Nanesenie pokrytii, travlenie i modifitsirovanie polimerov s ispol’zovaniem nizkoental’piinoi neravnovesnoi plazmy
M.V. Sobolevskii, O.A. Muzovskaya, G.S. Popeleva (1975)
Svoistva i oblasti primeneniya kremniiorganicheskikh produktov
C. Longmire (1963)
Elementary Plasma Physics
H. Yasuda (1985)
Plasma Polymerization
Yu.A. Ivanov, Yu.A. Lebedev, L.S. Polak (1981)
Metody kontaktnoi diagnostiki v neravnovesnoi plazmokhimii
A. Hasui (1975)
Tekhnika napyleniya
M.V. Sobolevskii (1985)
Oligoorganosiloksany: Svoistva, poluchenie, primenenie
(1977)
Khimicheskie reaktsii v nizkotemperaturnoi plazme
The method of polymerization in the plasma of a dc glow discharge was used to obtain thin-film polysiloxane coatings on metallic substrates. The chemical composition, structure, and deposition rate of the coatings were studied in relation to process parameters.
Russian Journal of Applied Chemistry – Springer Journals
Published: Mar 23, 2006
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