Comparison between the Ion-Beam and the Laser Long-Range Gettering of GaAs MESFETs

Comparison between the Ion-Beam and the Laser Long-Range Gettering of GaAs MESFETs A comparative experimental study is presented of the ion-beam and the laser long-range gettering in GaAs MESFETs using an n+nn–structure. It is shown that the similarity of the two processes results from the fact that both of them depend on the modification of the interfaces by elastic waves generated in the structure. It is demonstrated that the laser irradiation of quasi-ballistic MESFETs pretreated with neutrons allows one to create a system of radiation-induced channel defects that improves the performance of the device. http://www.deepdyve.com/assets/images/DeepDyve-Logo-lg.png Russian Microelectronics Springer Journals

Comparison between the Ion-Beam and the Laser Long-Range Gettering of GaAs MESFETs

Loading next page...
 
/lp/springer_journal/comparison-between-the-ion-beam-and-the-laser-long-range-gettering-of-v1QXmFGJGz
Publisher
Kluwer Academic Publishers-Plenum Publishers
Copyright
Copyright © 2004 by MAIK “Nauka/Interperiodica”
Subject
Engineering; Electrical Engineering
ISSN
1063-7397
eISSN
1608-3415
D.O.I.
10.1023/B:RUMI.0000018717.48338.42
Publisher site
See Article on Publisher Site

Abstract

A comparative experimental study is presented of the ion-beam and the laser long-range gettering in GaAs MESFETs using an n+nn–structure. It is shown that the similarity of the two processes results from the fact that both of them depend on the modification of the interfaces by elastic waves generated in the structure. It is demonstrated that the laser irradiation of quasi-ballistic MESFETs pretreated with neutrons allows one to create a system of radiation-induced channel defects that improves the performance of the device.

Journal

Russian MicroelectronicsSpringer Journals

Published: Oct 18, 2004

References

You’re reading a free preview. Subscribe to read the entire article.


DeepDyve is your
personal research library

It’s your single place to instantly
discover and read the research
that matters to you.

Enjoy affordable access to
over 12 million articles from more than
10,000 peer-reviewed journals.

All for just $49/month

Explore the DeepDyve Library

Unlimited reading

Read as many articles as you need. Full articles with original layout, charts and figures. Read online, from anywhere.

Stay up to date

Keep up with your field with Personalized Recommendations and Follow Journals to get automatic updates.

Organize your research

It’s easy to organize your research with our built-in tools.

Your journals are on DeepDyve

Read from thousands of the leading scholarly journals from SpringerNature, Elsevier, Wiley-Blackwell, Oxford University Press and more.

All the latest content is available, no embargo periods.

See the journals in your area

DeepDyve Freelancer

DeepDyve Pro

Price
FREE
$49/month

$360/year
Save searches from
Google Scholar,
PubMed
Create lists to
organize your research
Export lists, citations
Read DeepDyve articles
Abstract access only
Unlimited access to over
18 million full-text articles
Print
20 pages/month
PDF Discount
20% off