The potentialities of three techniques for detecting signals from barrier structures in a scanning electron microscope are discussed. All the methods are virtually contactless; that is, it is only required that the chips are grounded. The relaxation behavior of the signals is considered. The invalidity of the thermoacoustic detection technique is shown. It is experimentally demonstrated that information extracted with the method of electron-beam-induced surface potential is identical to that obtained by thermoacoustic detection.
Russian Microelectronics – Springer Journals
Published: Oct 10, 2004
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