The results of the quantitative approach for assessing the activity of solid surface from the values of inductive constants during the implementation processes of molecular layering (atomic layer deposition) on semiconductor matrixes are presented. For example, features of synthesis of oxide and nitride surface nanostructures on silicon show the possibility of the proposed approach to optimize the conditions of their formation and further development of chemical nanotechnology of low-dimensional systems.
Russian Microelectronics – Springer Journals
Published: May 20, 2010
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