This paper describes the model based on the Monte-Carlo method and presents the results of the mathematical simulation of the flow capacity of the exit aperture for an ion source with a ribbon-shaped beam and for the same source equipped with the system for ion beam neutralization and the electrostatic deflection system. For the designs mentioned above distributions of the normalized pressure and the collision thickness of gas along the channel axis are given. The results obtained are indicative of the fairly strong effect of these design elements on the flow capacity and, consequently, on the operating conditions of the ion source. The results of simulation can be used for correcting the value of the gas flow rate in the source for the purpose of maintaining invariant conditions of discharge glow, as well as for evaluating the effectiveness of the process of ion charge exchange in the source channel.
Russian Microelectronics – Springer Journals
Published: May 9, 2013
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