A new element of charged-particle optics is proposed and examined: an axially symmetric composite electromagnetic mirror employing a focusing magnetic field as well as an electrostatic one, the two fields overlapping. It is shown that the chromatic and spherical aberration coefficients of the mirror are opposite in sign to those found in conventional axially symmetric optics; their magnitude is twice the length of the paraxial particle trajectory as projected on the mirror axis of symmetry. As a result, the negative axial aberration coefficients can be varied over the wide range from a few millimeters to one meter with the mirror focal length and the particle energy being fixed. This property offers a way to fully compensate for the axial aberration of optimized ion or electron objective lenses in current use. A correction system incorporating the mirror is proposed. As compared with the sole correction arrangement used in electron optics, the system considered has about 1/5 times as many alignment degrees of freedom (mechanical and electrical) and should therefore display far greater stability; furthermore, it can work with ions as well as electrons.
Russian Microelectronics – Springer Journals
Published: Oct 26, 2006
It’s your single place to instantly
discover and read the research
that matters to you.
Enjoy affordable access to
over 18 million articles from more than
15,000 peer-reviewed journals.
All for just $49/month
Query the DeepDyve database, plus search all of PubMed and Google Scholar seamlessly
Save any article or search result from DeepDyve, PubMed, and Google Scholar... all in one place.
Get unlimited, online access to over 18 million full-text articles from more than 15,000 scientific journals.
Read from thousands of the leading scholarly journals from SpringerNature, Elsevier, Wiley-Blackwell, Oxford University Press and more.
All the latest content is available, no embargo periods.
“Hi guys, I cannot tell you how much I love this resource. Incredible. I really believe you've hit the nail on the head with this site in regards to solving the research-purchase issue.”Daniel C.
“Whoa! It’s like Spotify but for academic articles.”@Phil_Robichaud
“I must say, @deepdyve is a fabulous solution to the independent researcher's problem of #access to #information.”@deepthiw
“My last article couldn't be possible without the platform @deepdyve that makes journal papers cheaper.”@JoseServera