Acoustic Microscopy in Micrometrology

Acoustic Microscopy in Micrometrology In-depth analysis of the propagation of an acoustic signal excited by a short radio pulse is performed. The signal is reflected from the simple lens of a scanning acoustic microscope, and its power is detected. An expression for V(z) curve (acoustic signature of a material) is derived. It takes into account excitation conditions (delay and recording times of a signal to be detected) and lens parameters. http://www.deepdyve.com/assets/images/DeepDyve-Logo-lg.png Russian Microelectronics Springer Journals

Acoustic Microscopy in Micrometrology

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Publisher
Kluwer Academic Publishers-Plenum Publishers
Copyright
Copyright © 2001 by MAIK “Nauka/Interperiodica”
Subject
Engineering; Electrical Engineering
ISSN
1063-7397
eISSN
1608-3415
D.O.I.
10.1023/A:1009417724233
Publisher site
See Article on Publisher Site

Abstract

In-depth analysis of the propagation of an acoustic signal excited by a short radio pulse is performed. The signal is reflected from the simple lens of a scanning acoustic microscope, and its power is detected. An expression for V(z) curve (acoustic signature of a material) is derived. It takes into account excitation conditions (delay and recording times of a signal to be detected) and lens parameters.

Journal

Russian MicroelectronicsSpringer Journals

Published: Oct 10, 2004

References

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