Scientific basis and equipment design of the industrial absorption technology of fine cleaning of nitrogen trifluoride from tetrafluoromethane are elaborated. Experimental investigations were performed on a laboratory installation, and the examination of results of absorption cleaning on the pilot plant was carried out. The final content of tetrafluoromethane, 10 ppm, in nitrogen trifluoride was attained.
Russian Journal of Applied Chemistry – Springer Journals
Published: Jan 25, 2012
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