A virtual scanning electron microscope. 3. A semiempirical model of the SEM signal generation

A virtual scanning electron microscope. 3. A semiempirical model of the SEM signal generation Experiments are analyzed on scanning electron microscopes (SEMs) with test objects having a trapezoidal profile and large tilt angles of the side walls. Based on the analysis, a semiempirical generation model of images in a SEM, operating in the low-voltage mode and high-voltage mode during recording back-scattered and secondary slow electrons (SSEs), is proposed. The model is intended for application in a virtual SEM (VSEM). http://www.deepdyve.com/assets/images/DeepDyve-Logo-lg.png Russian Microelectronics Springer Journals

A virtual scanning electron microscope. 3. A semiempirical model of the SEM signal generation

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Publisher
Pleiades Publishing
Copyright
Copyright © 2014 by Pleiades Publishing, Ltd.
Subject
Engineering; Electrical Engineering
ISSN
1063-7397
eISSN
1608-3415
D.O.I.
10.1134/S1063739714040076
Publisher site
See Article on Publisher Site

Abstract

Experiments are analyzed on scanning electron microscopes (SEMs) with test objects having a trapezoidal profile and large tilt angles of the side walls. Based on the analysis, a semiempirical generation model of images in a SEM, operating in the low-voltage mode and high-voltage mode during recording back-scattered and secondary slow electrons (SSEs), is proposed. The model is intended for application in a virtual SEM (VSEM).

Journal

Russian MicroelectronicsSpringer Journals

Published: Jul 15, 2014

References

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