A microfluidic-based nanoscope

A microfluidic-based nanoscope  A novel technique for noninvasively measuring the shapes of walls with resolution approaching tens of nanometers is presented. The nanoscope measures local wall position by measuring the velocity of a fluid with micron-scale spatial resolution as it flows over a surface. The location of the wall is estimated by assuming the no-slip velocity condition at the wall and extrapolating the velocity profile to zero. Nanoscope measurements were obtained in a 30 × 300-μm channel. The wall shape of the glass microchannel was determined to be flat to within a root mean square uncertainty of 62 nm. Numerical simulations show that noise in the velocity measurements contributes significantly to uncertainty in wall position. The technique can be used to measure surfaces that are immersed in liquids and in geometries that do not provide exposed surfaces, where traditional nanoscope techniques such as scanning probe microscopes (SPM) are not applicable. http://www.deepdyve.com/assets/images/DeepDyve-Logo-lg.png Experiments in Fluids Springer Journals

A microfluidic-based nanoscope

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Publisher
Springer Journals
Copyright
Copyright © 2002 by Springer-Verlag Berlin Heidelberg
Subject
Engineering; Engineering Fluid Dynamics; Fluid- and Aerodynamics; Engineering Thermodynamics, Heat and Mass Transfer
ISSN
0723-4864
eISSN
1432-1114
D.O.I.
10.1007/s00348-001-0379-2
Publisher site
See Article on Publisher Site

Abstract

 A novel technique for noninvasively measuring the shapes of walls with resolution approaching tens of nanometers is presented. The nanoscope measures local wall position by measuring the velocity of a fluid with micron-scale spatial resolution as it flows over a surface. The location of the wall is estimated by assuming the no-slip velocity condition at the wall and extrapolating the velocity profile to zero. Nanoscope measurements were obtained in a 30 × 300-μm channel. The wall shape of the glass microchannel was determined to be flat to within a root mean square uncertainty of 62 nm. Numerical simulations show that noise in the velocity measurements contributes significantly to uncertainty in wall position. The technique can be used to measure surfaces that are immersed in liquids and in geometries that do not provide exposed surfaces, where traditional nanoscope techniques such as scanning probe microscopes (SPM) are not applicable.

Journal

Experiments in FluidsSpringer Journals

Published: Nov 1, 2002

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