The parameters of a helicon plasma source was studied for an rf power to 500 W and a magnetic field ranging from 0 to 200 G under an argon pressure of 3 mtorr. The electron density in the plasma was found to reach 1012 cm–3. Axial and radial electron distributions were studied. Helicon waves were excited by antennas of three types, a loop antenna being the most efficient. It is shown that the electron density in the plasma can significantly be increased if the system is under a nonuniform magnetic field such that its lower-value (relative to the rest of the system) part is applied to the antenna.
Russian Microelectronics – Springer Journals
Published: Oct 8, 2004
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