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Surface microstructure/miniature mass spectrometer:.processing and applications

Surface microstructure/miniature mass spectrometer:.processing and applications . Its fabrication is based on techniques used in microsystem processing and in particular anisotropic etching, thin film deposition, electroplating, and anodic bonding. The mass spectrometer consists of a plasma electron source for measurand ionisation as well as an ion optic and a mass separator specifically designed for the system’s small dimensions. http://www.deepdyve.com/assets/images/DeepDyve-Logo-lg.png Applied Physics A: Materials Science Processing Springer Journals

Surface microstructure/miniature mass spectrometer:.processing and applications

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References (1)

Publisher
Springer Journals
Copyright
Copyright © 1998 by Springer-Verlag
Subject
Physics; Condensed Matter Physics; Optical and Electronic Materials; Nanotechnology; Characterization and Evaluation of Materials; Surfaces and Interfaces, Thin Films; Operating Procedures, Materials Treatment
ISSN
0947-8396
eISSN
1432-0630
DOI
10.1007/s003390050754
Publisher site
See Article on Publisher Site

Abstract

. Its fabrication is based on techniques used in microsystem processing and in particular anisotropic etching, thin film deposition, electroplating, and anodic bonding. The mass spectrometer consists of a plasma electron source for measurand ionisation as well as an ion optic and a mass separator specifically designed for the system’s small dimensions.

Journal

Applied Physics A: Materials Science ProcessingSpringer Journals

Published: Aug 1, 1998

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