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Study of Surface Roughness Effect on Super–Normal Transition of Ti/Au Transition Edge Sensor Calorimeters

Study of Surface Roughness Effect on Super–Normal Transition of Ti/Au Transition Edge Sensor... We are developing transition edge sensor (TES) X-ray microcalorimeters for the future Japanese mission DIOS. It adopts microstrip readout wiring for low pixel-to-pixel crosstalk. In past samples, TES films composed of Ti and Au have not shown proper super–normal transition when it is deposited on the wiring. Assuming that surface roughness of the substrate can influence the transition, we reduced the surface roughness of the underneath layer before deposition of the TES film by using chemical mechanical polishing. We then found that the substrate becomes much smoother with a roughness of <1 nm rms and the TES film shows a proper transition. http://www.deepdyve.com/assets/images/DeepDyve-Logo-lg.png Journal of Low Temperature Physics Springer Journals

Study of Surface Roughness Effect on Super–Normal Transition of Ti/Au Transition Edge Sensor Calorimeters

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Publisher
Springer Journals
Copyright
Copyright © 2018 by Springer Science+Business Media, LLC, part of Springer Nature
Subject
Physics; Condensed Matter Physics; Characterization and Evaluation of Materials; Magnetism, Magnetic Materials
ISSN
0022-2291
eISSN
1573-7357
DOI
10.1007/s10909-018-1995-z
Publisher site
See Article on Publisher Site

Abstract

We are developing transition edge sensor (TES) X-ray microcalorimeters for the future Japanese mission DIOS. It adopts microstrip readout wiring for low pixel-to-pixel crosstalk. In past samples, TES films composed of Ti and Au have not shown proper super–normal transition when it is deposited on the wiring. Assuming that surface roughness of the substrate can influence the transition, we reduced the surface roughness of the underneath layer before deposition of the TES film by using chemical mechanical polishing. We then found that the substrate becomes much smoother with a roughness of <1 nm rms and the TES film shows a proper transition.

Journal

Journal of Low Temperature PhysicsSpringer Journals

Published: Jun 26, 2018

References