Microactuators are an important tool for precise manipulation of components and materials in nanotechnologies. The problems of design and application of microactuators for micro- and nanopositioning, microassembly, and microrobotics are considered in this paper. The basic parameters and models of piezoelectric, magnetostriction, electromagnetic, electrostatic, electrothermal, and hybrid microactuators are described. A general information approach that implies the description of physical models used in order to analyze microactuator behavior and optimize their design is considered.
Automatic Documentation and Mathematical Linguistics – Springer Journals
Published: Jan 27, 2012
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