A pulsed Langmuir probe method of plasma diagnostics is proposed and validated for low-pressure, high-density, low-temperature plasmas capable of producing a nonconducting film on the probe surface. The method essentially involves cyclic probe-surface cleaning by ion bombardment. A switching pattern of probe potential is designed, taking into account the mechanism by which a space-charge region is formed near the probe. The method is successfully employed in an experiment on inductively coupled CHF3 and Ar plasmas. The results of the experiment are presented.
Russian Microelectronics – Springer Journals
Published: Feb 1, 2007
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