Results of the review of numerous investigations in the field of modern nanooptics, which show that there are various penetration mechanisms of laser radiation energy inside subwave apertures, are presented. They also show that the methods of laser imitation simulation of bulk ionization effects can be used up to nanometer levels of microcircuit technology with the obligatory dosimetry calibration.
Russian Microelectronics – Springer Journals
Published: Mar 26, 2014
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