The results of numerical simulation of gas-dynamic processes in heat exchange during a plasma chemical synthesis of trichlorosilane under high frequency discharge were reported. Modeling was performed for optimal conditions of trichlorosilane synthesis with use of contemporary computational methods of hydrodynamics that allowed more exact definition of the velocity and temperature fields, gas flow in a plasma area, and also determination of temperature ranges of reaction zones and proportion in the gas mixture entering the respective zones.
Russian Journal of Applied Chemistry – Springer Journals
Published: Dec 30, 2014
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