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Dry Etching of Copper Using Chlorine: A Review

Dry Etching of Copper Using Chlorine: A Review Scientific and engineering aspects of the dry etching of copper using chlorine are reviewed. Some new results are included. http://www.deepdyve.com/assets/images/DeepDyve-Logo-lg.png Russian Microelectronics Springer Journals

Dry Etching of Copper Using Chlorine: A Review

Russian Microelectronics , Volume 31 (3) – Oct 13, 2004

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References (36)

Publisher
Springer Journals
Copyright
Copyright © 2002 by MAIK "Nauka/Interperiodica"
Subject
Engineering; Electrical Engineering
ISSN
1063-7397
eISSN
1608-3415
DOI
10.1023/A:1015463004089
Publisher site
See Article on Publisher Site

Abstract

Scientific and engineering aspects of the dry etching of copper using chlorine are reviewed. Some new results are included.

Journal

Russian MicroelectronicsSpringer Journals

Published: Oct 13, 2004

There are no references for this article.