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Development of Thermal Kinetic Inductance Detectors Suitable for X-ray Spectroscopy

Development of Thermal Kinetic Inductance Detectors Suitable for X-ray Spectroscopy We report on the development of thermal kinetic inductance detectors (TKIDs) suitable to perform X-ray spectroscopy measurements. The aim is to implement MKIDs sensors working in thermal quasi-equilibrium mode to detect X-ray photons as pure calorimeters. The thermal mode is a variation on the MKID classical way of operation that has generated interest in recent years. TKIDs can offer the MKIDs inherent multiplexibility in the frequency domain, a high spatial resolution comparable with CCDs, and an energy resolution theoretically limited only by thermodynamic fluctuations across the thermal weak links. Microresonators are built in Ti/TiN multilayer technology with the inductive part thermally coupled with a metal absorber on a suspended SiN membrane, to avoid escape of phonons from the film to the substrate. The mid-term goal is to optimize the single-pixel design in terms of superconducting critical temperatures, internal quality factors, kinetic inductance and spectral energy resolution. The final goal is to realize a demonstrator array for a next generation thousand pixels X-ray spectrometer. In this contribution, the status of the project after one year of developments is reported, with detailed reference to the microresonators design and simulations and to the fabrication process. http://www.deepdyve.com/assets/images/DeepDyve-Logo-lg.png Journal of Low Temperature Physics Springer Journals

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Publisher
Springer Journals
Copyright
Copyright © 2018 by Springer Science+Business Media, LLC, part of Springer Nature
Subject
Physics; Condensed Matter Physics; Characterization and Evaluation of Materials; Magnetism, Magnetic Materials
ISSN
0022-2291
eISSN
1573-7357
DOI
10.1007/s10909-018-2043-8
Publisher site
See Article on Publisher Site

Abstract

We report on the development of thermal kinetic inductance detectors (TKIDs) suitable to perform X-ray spectroscopy measurements. The aim is to implement MKIDs sensors working in thermal quasi-equilibrium mode to detect X-ray photons as pure calorimeters. The thermal mode is a variation on the MKID classical way of operation that has generated interest in recent years. TKIDs can offer the MKIDs inherent multiplexibility in the frequency domain, a high spatial resolution comparable with CCDs, and an energy resolution theoretically limited only by thermodynamic fluctuations across the thermal weak links. Microresonators are built in Ti/TiN multilayer technology with the inductive part thermally coupled with a metal absorber on a suspended SiN membrane, to avoid escape of phonons from the film to the substrate. The mid-term goal is to optimize the single-pixel design in terms of superconducting critical temperatures, internal quality factors, kinetic inductance and spectral energy resolution. The final goal is to realize a demonstrator array for a next generation thousand pixels X-ray spectrometer. In this contribution, the status of the project after one year of developments is reported, with detailed reference to the microresonators design and simulations and to the fabrication process.

Journal

Journal of Low Temperature PhysicsSpringer Journals

Published: Jul 28, 2018

References