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Development of 4-Pixel-Array TES Microcalorimeters with Mushroom-Shaped Absorbers with Insulating Layers Supporting Overhang Regions

Development of 4-Pixel-Array TES Microcalorimeters with Mushroom-Shaped Absorbers with Insulating... A four-pixel-array superconducting transition-edge sensor (TES) microcalorimeter with a mushroom-shaped absorber was developed for energy dispersive spectroscopy performed on a transmission electron microscope. The TES consists of a bilayer of Au/Ti with either a 120- or 50-nm thickness. The absorber is made from a Au layer and its stem is deposited in the center of the TES surface. A Ta $${_{2}}$$ 2 O $${_{5}}$$ 5 insulating layer of 100-nm thickness is inserted between the overhang region of the absorber and the TES surface. Two types of microcalorimeter were fabricated with differing absorber thicknesses of 0.5 and 5.0 $${\upmu }$$ μ m. An energy resolution of 15 eV FWHM with 5.9-keV X-rays was obtained using the 0.5- $${\upmu }$$ μ m-type microcalorimeter. http://www.deepdyve.com/assets/images/DeepDyve-Logo-lg.png Journal of Low Temperature Physics Springer Journals

Development of 4-Pixel-Array TES Microcalorimeters with Mushroom-Shaped Absorbers with Insulating Layers Supporting Overhang Regions

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Publisher
Springer Journals
Copyright
Copyright © 2014 by Springer Science+Business Media New York
Subject
Physics; Condensed Matter Physics; Characterization and Evaluation of Materials; Magnetism, Magnetic Materials
ISSN
0022-2291
eISSN
1573-7357
DOI
10.1007/s10909-014-1113-9
Publisher site
See Article on Publisher Site

Abstract

A four-pixel-array superconducting transition-edge sensor (TES) microcalorimeter with a mushroom-shaped absorber was developed for energy dispersive spectroscopy performed on a transmission electron microscope. The TES consists of a bilayer of Au/Ti with either a 120- or 50-nm thickness. The absorber is made from a Au layer and its stem is deposited in the center of the TES surface. A Ta $${_{2}}$$ 2 O $${_{5}}$$ 5 insulating layer of 100-nm thickness is inserted between the overhang region of the absorber and the TES surface. Two types of microcalorimeter were fabricated with differing absorber thicknesses of 0.5 and 5.0 $${\upmu }$$ μ m. An energy resolution of 15 eV FWHM with 5.9-keV X-rays was obtained using the 0.5- $${\upmu }$$ μ m-type microcalorimeter.

Journal

Journal of Low Temperature PhysicsSpringer Journals

Published: Feb 12, 2014

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