Development of 4-Pixel-Array TES Microcalorimeters with Mushroom-Shaped Absorbers with Insulating Layers Supporting Overhang Regions
Development of 4-Pixel-Array TES Microcalorimeters with Mushroom-Shaped Absorbers with Insulating...
Maehata, K.; Iyomoto, N.; Maeda, M.; Ezaki, S.; Takano, A.; Matsumura, S.; Hara, T.; Mitsuda, K.; Yamasaki, N.; Tanaka, K.
2014-02-12 00:00:00
A four-pixel-array superconducting transition-edge sensor (TES) microcalorimeter with a mushroom-shaped absorber was developed for energy dispersive spectroscopy performed on a transmission electron microscope. The TES consists of a bilayer of Au/Ti with either a 120- or 50-nm thickness. The absorber is made from a Au layer and its stem is deposited in the center of the TES surface. A Ta
$${_{2}}$$
2
O
$${_{5}}$$
5
insulating layer of 100-nm thickness is inserted between the overhang region of the absorber and the TES surface. Two types of microcalorimeter were fabricated with differing absorber thicknesses of 0.5 and 5.0
$${\upmu }$$
μ
m. An energy resolution of 15 eV FWHM with 5.9-keV X-rays was obtained using the 0.5-
$${\upmu }$$
μ
m-type microcalorimeter.
http://www.deepdyve.com/assets/images/DeepDyve-Logo-lg.pngJournal of Low Temperature PhysicsSpringer Journalshttp://www.deepdyve.com/lp/springer-journals/development-of-4-pixel-array-tes-microcalorimeters-with-mushroom-qLIJdauY6V
Development of 4-Pixel-Array TES Microcalorimeters with Mushroom-Shaped Absorbers with Insulating Layers Supporting Overhang Regions
A four-pixel-array superconducting transition-edge sensor (TES) microcalorimeter with a mushroom-shaped absorber was developed for energy dispersive spectroscopy performed on a transmission electron microscope. The TES consists of a bilayer of Au/Ti with either a 120- or 50-nm thickness. The absorber is made from a Au layer and its stem is deposited in the center of the TES surface. A Ta
$${_{2}}$$
2
O
$${_{5}}$$
5
insulating layer of 100-nm thickness is inserted between the overhang region of the absorber and the TES surface. Two types of microcalorimeter were fabricated with differing absorber thicknesses of 0.5 and 5.0
$${\upmu }$$
μ
m. An energy resolution of 15 eV FWHM with 5.9-keV X-rays was obtained using the 0.5-
$${\upmu }$$
μ
m-type microcalorimeter.
Journal
Journal of Low Temperature Physics
– Springer Journals
To get new article updates from a journal on your personalized homepage, please log in first, or sign up for a DeepDyve account if you don’t already have one.
All DeepDyve websites use cookies to improve your online experience. They were placed on your computer when you launched this website. You can change your cookie settings through your browser.