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M. Bruijn, Norman Baars, W. Tiest, A. Germeau, H. Hoevers, P. Korte, W. Mels, M. Ridder, E. Krouwer, J. Baar, R. Wiegerink (2003)
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- Publisher
- Springer Journals
- Copyright
- Copyright © 2008 by Springer Science+Business Media, LLC
- Subject
- Physics; Condensed Matter Physics; Characterization and Evaluation of Materials; Magnetism, Magnetic Materials
- ISSN
- 0022-2291
- eISSN
- 1573-7357
- DOI
- 10.1007/s10909-007-9681-6
- Publisher site
- See Article on Publisher Site
Abstract
In this paper we describe microfabrication developments for a 1024 pixel calorimeter array, to be used in future X-ray spectroscopic space missions. We report on an optimization study of high packing factor, mushroom shaped, Cu/Bi absorbers, for which a sputter deposition technique into a new type of photoresist mould has been developed. We have fabricated a prototype 32×32 array where 98 representable pixels are potentially functioning TESs. To gain more control on the detector pixel performance a new procedure was developed to couple absorber and thermometer, utilizing a thin insulating layer. Advances are reported in the fabrication of superconducting LC resonating circuits, needed for frequency domain multiplexed read out. A quality factor Q∼4000 @ 2.6 MHz has been measured, which was limited by critical current in the circuit.
Journal
Journal of Low Temperature Physics – Springer Journals
Published: Jan 17, 2008