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Structure-Zone Models Of Thin Films

Structure-Zone Models Of Thin Films Structure zone models based on examinations of thin films using optical and scanning microcopy have provided useful guide-lines in categorizing general regimes of film growth behavior. However, many observations have been made since the original zone model for evaporated coatings was proposed by Movchan and Demichishin in 1962 and extended to magnetron sputtering in 1974. The purpose of this paper is to revisit the structure zone models and their physical interpretation in the light of recent experimental and computer simulation observations. http://www.deepdyve.com/assets/images/DeepDyve-Logo-lg.png Proceedings of SPIE SPIE

Structure-Zone Models Of Thin Films

Proceedings of SPIE , Volume 821 – Feb 2, 1988

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Publisher
SPIE
Copyright
COPYRIGHT SPIE. Downloading of the abstract is permitted for personal use only.
ISSN
0277-786X
eISSN
1996-756X
DOI
10.1117/12.941846
Publisher site
See Article on Publisher Site

Abstract

Structure zone models based on examinations of thin films using optical and scanning microcopy have provided useful guide-lines in categorizing general regimes of film growth behavior. However, many observations have been made since the original zone model for evaporated coatings was proposed by Movchan and Demichishin in 1962 and extended to magnetron sputtering in 1974. The purpose of this paper is to revisit the structure zone models and their physical interpretation in the light of recent experimental and computer simulation observations.

Journal

Proceedings of SPIESPIE

Published: Feb 2, 1988

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