Structure zone models based on examinations of thin films using optical and scanning microcopy have provided useful guide-lines in categorizing general regimes of film growth behavior. However, many observations have been made since the original zone model for evaporated coatings was proposed by Movchan and Demichishin in 1962 and extended to magnetron sputtering in 1974. The purpose of this paper is to revisit the structure zone models and their physical interpretation in the light of recent experimental and computer simulation observations.
Proceedings of SPIE – SPIE
Published: Feb 2, 1988