Exploring the explosive ablation regime of metals in nanosecond micromachining

Exploring the explosive ablation regime of metals in nanosecond micromachining We present results of single shot ablation experiments for a variety of metal samples (In, Al, Cu, Mo, W, Ti) using visible, nanosecond lasers at fluences up to approximately 10 4 J cm -2 . At low fluences, usually less than 10 2 J cm -2 , small amounts of material were removed and removal was approximately uniform across the ablation crater. As the fluence increased above approximately 10 2 J cm -2 , substantially more material was removed and a conical pit developed in the center of the ablation crater. The appearance of these conical pits is consistent with material removed by phase explosion mechanisms. In this paper, this ablation phenomenon will be investigated by presenting the crater morphology as a function of fluence. Consequences for micromachining with visible, high repetition rate, nanosecond lasers will be discussed. http://www.deepdyve.com/assets/images/DeepDyve-Logo-lg.png Proceedings of SPIE SPIE

Exploring the explosive ablation regime of metals in nanosecond micromachining

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Publisher
SPIE
Copyright
Copyright © 2003 COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
ISSN
0277-786X
eISSN
1996-756X
D.O.I.
10.1117/12.376996
Publisher site
See Article on Publisher Site

Abstract

We present results of single shot ablation experiments for a variety of metal samples (In, Al, Cu, Mo, W, Ti) using visible, nanosecond lasers at fluences up to approximately 10 4 J cm -2 . At low fluences, usually less than 10 2 J cm -2 , small amounts of material were removed and removal was approximately uniform across the ablation crater. As the fluence increased above approximately 10 2 J cm -2 , substantially more material was removed and a conical pit developed in the center of the ablation crater. The appearance of these conical pits is consistent with material removed by phase explosion mechanisms. In this paper, this ablation phenomenon will be investigated by presenting the crater morphology as a function of fluence. Consequences for micromachining with visible, high repetition rate, nanosecond lasers will be discussed.

Journal

Proceedings of SPIESPIE

Published: Feb 1, 2000

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