Quantitative deflectometry is a new tool to measure specular surfaces. The spectrum of measurable surfaces ranges from flat to freeform surfaces with steep slopes, with a size ranging from millimeters to several meters. We illustrate this by several applications: eye glass measurements, measurements of big mirrors, and in-line measurements in ultra-precision manufacturing without unclamping of the sample. We describe important properties of deflectometry and compare its potentials and limitations with interferometry. We discuss which method is superior for which application and how the potential of deflectometry may be developing in the future.
Proceedings of SPIE – SPIE
Published: Apr 9, 2013
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